お店のコメント(スペック情報を含む場合もあり)
内容説明 Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
商品ジャンル
商品名
最終調査日時
2012/12/01 (Sat) 17:55:34
価格の変動(直近3回 : ¥0は未調査回)
取得日時
販売価格
ポイント
実質価格
在庫状態
2012/12/01 (Sat) 17:55:34
¥41,099
0 %
¥41,099
2012/03/08 (Thu) 22:12:09
¥34,274
0 %
¥34,274
2011/12/15 (Thu) 10:42:30
¥32,247
0 %
¥32,247
サイト内キーワード検索
商品名の検索は通常の商品検索ボックスで。
コメントやスペックなどから検索したい場合はこちらから。
コメントやスペックなどから検索したい場合はこちらから。
広告